Metrology SEM+FIB system

Summary

The tender concerns the supply and delivery of one new metrology SEM+FIB system for material milling, 3D characterisation and cross-section analysis of semiconductor layers at TNO’s High Tech Campus Eindhoven. The contract includes 24 months of warranty, maintenance and services, design review, factory and site acceptance testing, commissioning and delivery under DDP terms. A post-warranty maintenance contract, consumables and an optional second system may also be included. Tenders must be submitted electronically through TenderNed by 7 September 2026 at 12:00, remain valid for 120 calendar days and be prepared using the prescribed Annexes A01–A05. The lowest total price is the only award criterion. The estimated contract value is EUR 1,300,000 excluding VAT; the one-year post-warranty maintenance price may not exceed 4% of the equipment price.