Maskless Lithography System

Summary

The procurement concerns the supply and operational handover of a maskless lithography system for the Institute of Applied Physics at Technische Universität Dresden. The system must provide direct raster-based UV exposure. The work includes delivery, installation, commissioning and equipment-specific training. The deadline for submitting bids is 23 October 2026 at 14:00, and bids must remain valid until 4 December 2026. The procurement is not divided into lots, and variants are not permitted. Bidders must provide verifiable references for comparable work carried out during the last three completed financial years, as well as a document or declaration confirming payment of taxes, duties and statutory social security contributions. The technical compliance requirements and evaluation details must be checked in the official tender documents.