Electron Beam Lithography Tool

Summary

Lund University is procuring one electron beam lithography (EBL) tool for Lund Nano Lab, as a single lot. The instrument must support high-resolution, repeatable and high-throughput patterning, automated self-calibration for long exposures, and flexible sample loading for small samples and wafers up to 8 inches in diameter. The supply also covers warranty, packaging, insurance, transport, on-site installation and commissioning, factory and site acceptance testing, training, documentation, support and software updates. The estimated contract value is SEK 26 million.