Supply of a Photolithography Mask Aligner with Accessories

Summary

The procurement covers the supply of one photolithography mask aligner, including the accessories and auxiliary equipment needed to operate PIXEurope’s open-access integrated photonics pilot line. The contract also includes installation, at least one year of advanced manufacturer support and warranty, and the support described in the technical specifications. The equipment must meet detailed minimum technical requirements, including use with wafers and substrates up to 100 mm and masks up to 5 × 5 inches, as well as specified proximity and contact exposure modes and resolution levels. Delivery is to Fundación IMDEA Networks in Leganés. The delivery period is 30 weeks from the day after contract signature, followed by 8 weeks of testing. The contract is not divided into lots. The estimated value is €162,000 excluding VAT (€196,020 including VAT), and the bid price must not exceed the ex-VAT budget. Evaluation awards up to 40 points for price, 10 for an extended warranty, 40 for the technical proposal and 10 for the preventive and evolutionary maintenance plan; at least half of the available points must be achieved for the criteria assessed by technical judgment. Bidders must demonstrate the required turnover, comparable supply experience and quality-management certification, and submit the required technical and administrative documents.