Renewal and expansion of an MOVPE system for III-nitrides and 2D semiconductors

Summary

The University of Duisburg-Essen is procuring the renewal and expansion of an existing Aixtron MOVPE system for research into III-nitrides and 2D semiconductors. The work includes replacing the process pump, gas inlet and four check valves, and connecting ethene and triethylborane sources to the system. The contractor must supply the necessary parts, install and integrate them, update the control software, and commission and test the system to ensure it is operational and meets the requirements. The modified system must be compatible with the existing equipment and operate safely. Final acceptance includes functional and leak tests; the leak rate must be below 10⁻⁹ mbar/s at a pressure of 5 × 10⁻³ mbar. Spare parts must be available for at least five years, and the offer must include technical support available on working days from 09:00 to 17:00, with a response time of no more than 72 working hours. Delivery is due within six months of acceptance of the offer. Optional process support must be described and priced separately. Price is the only award criterion; if the optional support is commissioned, its price will be included in the total-price comparison. Bids must be submitted electronically by 30 October 2026 at 12:00; variants are not permitted. The bidder must submit at least three relevant references for Aixtron MOVPE systems from the past three years and evidence of the required professional liability insurance. The declarations and offer forms required by the tender documents must also be submitted.