300 mm Profilometer

Summary

The procurement is for one 300 mm profilometer for stylus-based measurement of surface profiles, structure thickness, roughness and bow on 100–300 mm wafers and panels up to 300 × 300 mm. The instrument must support 2D and 3D measurements and meet detailed requirements for its measurement stage, sample handling, software, installation, power supply and safety documentation. The manufacturer must provide operating training for two engineers or technicians. The bidder must submit a company profile, turnover figures for 2022–2024 and, if available, 2025, and at least three references for comparable projects dating from 2023 or later. The offer must identify the manufacturer’s part number and state a binding delivery time in whole calendar weeks from contract award. The net price must not exceed EUR 200,000. Delivery and acceptance are due by 17 December 2026; delivery planned after that date requires a 100% bank guarantee, whose original and the invoice must reach Fraunhofer in Munich by 4 December 2026. Price accounts for 45% of the evaluation and technical performance for 55%. The offer must include the completed technical details table and signed declarations concerning exclusion grounds and EU Regulation 833/2014, as well as the signed export-classification form. If the contracting authority has issued bidder information, its signed return copy must also be submitted. Use the authority’s forms and submit a complete offer by the deadline; incomplete or late submissions may be excluded.