Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source

Summary

The Technical University of Denmark (DTU) is procuring one gallium-ion-source, dual-beam focused ion beam scanning electron microscope (FIB-SEM) for its site in Kgs. Lyngby, including delivery, installation, commissioning and acceptance. The instrument will support multi-user research, including high-resolution surface imaging, cross-sectioning, TEM lamella preparation, 3D tomography, gas-assisted deposition and etching, and elemental analysis. The procurement also includes options for additional ToF-SIMS and EDS software licences, a 4D-STEM detector, and an inert-atmosphere or vacuum transfer chamber.