Acquisition and installation of a high-resolution confocal laser optical profilometer

Summary

The CNRS Alpes Delegation is procuring and installing a high-resolution confocal laser optical profilometer in Grenoble. The equipment must enable 3D reconstruction of profiles with micrometric lateral dimensions and submicrometric or micrometric vertical dimensions, with z-resolution below 20 nm at high magnification. It must also measure nan topography and surface roughness below 100 nm by interferometry over large fields.