Electron Beam Evaporator

Summary

The tender concerns the supply, installation and commissioning of one electron beam evaporation system for the Max Planck Institute for Microstructure Physics in Halle. The turnkey solution must support precise thin-film deposition in high vacuum and meet the stated minimum technical requirements. The system must include, among other things, a PVD platform with an internal height of at least 500 mm, a rotating substrate station for 100 × 100 mm or 100 mm diameter substrates, vacuum pumps, a vacuum measurement system, an electron-beam source rated up to 6 kW, at least four pockets with a volume of at least 7 cc, a quartz sensor, a thin-film deposition controller, Windows-based control software, installation, commissioning and operator training. Delivery must take place within 10 months after the order, and the warranty must last at least 24 months. A separate detailed technical specification must accompany the tender. Price is the only award criterion, with a weighting of 100%.