EHEuroopahanked
ET Sign in Register

Tender detail

Delivery and installation of an ICP reactive ion etcher for silicon dielectrics

Summary

The Technical University of Denmark’s DTU Nanolab is procuring delivery and installation of a high-ion-density reactive ion etcher for processing silicon oxides and nitrides. The instrument is to process 150 mm wafers; an upgrade kit for 200 mm wafers must be offered as an option, and DTU may also purchase one additional identical instrument. Delivery is expected no later than the third quarter of 2027.

Reference number
701524-2026
Buyer
Danmarks Tekniske Universitet - DTU
Country
Denmark (DNK)
Procedure
Open procedure
CPV
42000000 Industrial machinery
Deadline
2026-11-23
Status
Open
Contract subject
Supplies
Estimated value
Not published
Source
TED
Open tender Open tender source details

More tender information after sign-in

The public view shows key tender details. Sign in to open official links, documents and AI tender support.

Sign in Register

Same country tenders

Tender Deadline View
Window cleaning and related services 2026-10-12
Gribskov Municipality care homes and elderly housing management 2026-10-12
Airborne Maritime Pollution Surveillance 2026-10-12
Economic analysis support for the Topic Centre on Environmental Economics 2026-10-12
Re-tender for a Framework Agreement for High-Voltage Cables 2026-10-12
Fuel supply to Entreprenørgården, Silkeborg Municipality 2026-10-12
Property management of elderly and care housing in Herning Municipality 2026-10-12
Window cleaning at CBS 2026-10-13
Framework agreement for contrast injectors for CT and MRI scanning 2026-10-13
View all tenders from this country

Same CPV sector tenders

Tender Country Deadline View
Supply of a telescopic handler with screening bucket Portugal 2026-10-12
Supply of guide tapes for industrial calenders at SUCH production units Portugal 2026-10-12
Supply of equipment for Asturias Airport’s rescue and operational services Spain 2026-10-12
Supply of additive manufacturing laboratory equipment and technical materials and consumables for drone production Poland 2026-10-12
Purchase of a Mobile Ice Rink Poland 2026-10-12
Modernisation of the technological cooling system by supplying and installing a water chiller Poland 2026-10-12
Supply of pipe-flange connectors, double-flanged FFR fittings and installation pieces Poland 2026-10-12
Sample Storage System in Liquid Nitrogen Vapour Lithuania 2026-10-12
Purchase and delivery of a mobile twin-shaft shredder for construction waste Poland 2026-10-12
View all tenders in this CPV sector