Delivery and installation of a high-ion-density etcher for lithium niobate on insulator

Summary

The tender concerns the delivery and installation of a high-ion-density reactive ion etcher in the DTU Nanolab cleanroom. The instrument must support 150 mm lithium-niobate-on-insulator wafer processing, stable etch recipes, and etching at both nanometre and micrometre scales, typically to depths of a few hundred nanometres. Key performance requirements include precise etch-depth control, profile control, uniformity, selectivity and, in particular, smooth sidewalls for producing optical waveguides, gratings and other low-roughness optical devices. Delivery is expected no later than the fourth quarter of 2027, and the tender submission deadline is 8 October 2026.