Ultrahigh-vacuum magnetron sputter coating system

Summary

The University of Duisburg-Essen is procuring an ultrahigh-vacuum magnetron sputter coating system for its laboratory in Duisburg. The supply includes the vacuum and coating chambers, pumping and measurement equipment, magnetron sources and power supplies, substrate handling and heating, process-gas controls, thickness monitoring, a control computer and software. Delivery, installation, commissioning, functional testing and on-site user instruction are included.